Issued Patents All Time
Showing 76–100 of 139 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6309932 | Process for forming a plasma nitride film suitable for gate dielectric application in sub-0.25 .mu.m technologies | Yi Ma | 2001-10-30 |
| 6306780 | Method for making a photoresist layer having increased resistance to blistering, peeling, lifting, or reticulation | Konstantin Bourdelle | 2001-10-23 |
| 6291848 | Integrated circuit capacitor including anchored plugs | Sundar Srinivasan Chetlur, James T. Clemens, Sailesh Mansinh Merchant, Hem M. Vaidya | 2001-09-18 |
| 6287970 | Method of making a semiconductor with copper passivating film | Sailesh Mansinh Merchant, Sudhanshu Misra, William M. Moller | 2001-09-11 |
| 6281138 | System and method for forming a uniform thin gate oxide layer | David C. Brady, Isik C. Kizilyalli, Yi Ma | 2001-08-28 |
| 6281110 | Method for making an integrated circuit including deutrium annealing of metal interconnect layers | Isik C. Kizilyalli, Sailesh Mansinh Merchant | 2001-08-28 |
| 6265890 | In-line non-contact depletion capacitance measurement method and apparatus | Carlos M. Chacon, Sailesh Chittipeddi | 2001-07-24 |
| 6265260 | Method for making an integrated circuit capacitor including tantalum pentoxide | Glenn B. Alers | 2001-07-24 |
| 6258231 | Chemical mechanical polishing endpoint apparatus using component activity in effluent slurry | William Easter, Sudhanshu Misra, Susan Clay Vitkavage | 2001-07-10 |
| 6255128 | Non-contact method for determining the presence of a contaminant in a semiconductor device | Carlos M. Chacon | 2001-07-03 |
| 6251697 | Non-contact method for monitoring and controlling plasma charging damage in a semiconductor device | Carlos M. Chacon | 2001-06-26 |
| 6249016 | Integrated circuit capacitor including tapered plug | Samir Chaudhry, Sundar Srinivasan Chetlur, Nace Layadi, Hem M. Vaidya | 2001-06-19 |
| 6246095 | System and method for forming a uniform thin gate oxide layer | David C. Brady, Yi Ma | 2001-06-12 |
| 6235594 | Methods of fabricating an integrated circuit device with composite oxide dielectric | Sailesh Mansinh Merchant | 2001-05-22 |
| 6218255 | Method of making a capacitor | Larry Bruce Fritzinger, Nace Layadi, Sailesh Mansinh Merchant | 2001-04-17 |
| 6214732 | Chemical mechanical polishing endpoint detection by monitoring component activity in effluent slurry | William Easter, Sudhanshu Misra, Susan Clay Vitkavage | 2001-04-10 |
| 6207586 | Oxide/nitride stacked gate dielectric and associated methods | Yi Ma | 2001-03-27 |
| 6207468 | Non-contact method for monitoring and controlling plasma charging damage in a semiconductor device | Carlos M. Chacon | 2001-03-27 |
| 6204186 | Method of making integrated circuit capacitor including tapered plug | Samir Chaudhry, Sundar Srinivasan Chetlur, Nace Layadi, Hem M. Vaidya | 2001-03-20 |
| 6187665 | Process for deuterium passivation and hot carrier immunity | Sundar Srinivasan Chetlur, Anthony Oates, Sidhartha Sen, Jonathan Zhou | 2001-02-13 |
| 6180518 | Method for forming vias in a low dielectric constant material | Nace Layadi, Sailesh Mansinh Merchant, Simon John Molloy | 2001-01-30 |
| 6177363 | Method for forming a nitride layer suitable for use in advanced gate dielectric materials | Yi Ma, Michael Laughery | 2001-01-23 |
| 6168991 | DRAM capacitor including Cu plug and Ta barrier and method of forming | Seungmoo Choi, Sailesh Mansinh Merchant | 2001-01-02 |
| 6153452 | Method of manufacturing semiconductor devices having improved polycide integrity through introduction of a silicon layer within the polycide structure | Sailesh Mansinh Merchant, Arun K. Nanda, Hem M. Vaidya | 2000-11-28 |
| 6147388 | Polycide gate structure with intermediate barrier | Yi Ma, Sailesh Mansinh Merchant, Minseok Oh | 2000-11-14 |