Issued Patents All Time
Showing 26–50 of 101 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11688580 | Apparatus of plural charged-particle beams | Weiming Ren, Shuai Li, Zhongwei Chen | 2023-06-27 |
| 11676793 | Apparatus of plural charged particle beams | Weiming Ren, Xuerang Hu, Zhong-Wei Chen | 2023-06-13 |
| 11676792 | Sample pre-charging methods and apparatuses for charged particle beam inspection | Qingpo Xi, Youfei Jiang, Weiming Ren, Xuerang Hu, Zhongwei Chen | 2023-06-13 |
| 11670477 | Apparatus using charged particle beams | Xuerang Hu, Weiming Ren, Zhong-Wei Chen | 2023-06-06 |
| 11614416 | System and method for aligning electron beams in multi-beam inspection apparatus | Xuerang Hu, Xinan Luo, Qingpo Xi, Weiming Ren | 2023-03-28 |
| 11594396 | Multi-beam inspection apparatus with single-beam mode | Weiming Ren, Xuerang Hu, Zhong-Wei Chen | 2023-02-28 |
| 11587758 | Apparatus of plural charged-particle beams | Weiming Ren, Xuerang Hu, Zhongwei Chen | 2023-02-21 |
| 11569060 | Methods and apparatuses for adjusting beam condition of charged particles | — | 2023-01-31 |
| 11541867 | Method and device for controlling motion of vehicle, and vehicle | Shengbo Li, Bo Cheng, Keqiang LI, Hongbo Gao, Qingfeng Lin +5 more | 2023-01-03 |
| 11538655 | Multi-beam inspection apparatus | Xuerang Hu, Zhong-Wei Chen, Weiming Ren | 2022-12-27 |
| 11513087 | Systems and methods for voltage contrast defect detection | Weiming Ren, Zhong-Wei Chen, Xiaoyu JI, Xiaoxue CHEN, Weimin Zhou +1 more | 2022-11-29 |
| 11469076 | System and method for scanning a sample using multi-beam inspection apparatus | Martinus Gerardus Maria Johannes Massen, Joost Jeroen Ottens, Long Ma, Youfei Jiang, Weihua Yin +1 more | 2022-10-11 |
| 11469074 | Multiple charged-particle beam apparatus with low crosstalk | Weiming Ren, Xuerang Hu, Qingpo Xi | 2022-10-11 |
| 11430631 | Methods of inspecting samples with multiple beams of charged particles | Kuo-Shih Liu, Wei Fang, Jack Jau | 2022-08-30 |
| 11398368 | Apparatus of plural charged-particle beams | Weiming Ren, Xuerang Hu, Zhongwei Chen | 2022-07-26 |
| 11328894 | Systems and methods for compensating dispersion of a beam separator in a single-beam or multi-beam apparatus | Weiming Ren, Xuerang Hu, Xinan Luo, Zhongwei Chen | 2022-05-10 |
| 11302514 | Apparatus for multiple charged-particle beams | Weiming Ren, Xuerang Hu, Zong-wei Chen | 2022-04-12 |
| 11289304 | Apparatus using multiple beams of charged particles | Xuerang Hu, Weiming Ren, Zhong-Wei Chen | 2022-03-29 |
| 11282675 | Multi-beam inspection apparatus with improved detection performance of signal electrons | Weiming Ren, Xuerang Hu, Zhong-Wei Chen | 2022-03-22 |
| 11232928 | Multi-beam inspection apparatus | Weiming Ren, Qian Zhang, Xuerang Hu | 2022-01-25 |
| 11217423 | Apparatus of plural charged-particle beams | Weiming Ren, Shuai Li, Zhongwei Chen, Jack Jau | 2022-01-04 |
| 11107657 | Apparatus of plural charged-particle beams | Weiming Ren, Shuai Li, Zhongwei Chen | 2021-08-31 |
| 11062874 | Apparatus using multiple charged particle beams | Weiming Ren, Xuerang Hu, Zhong-Wei Chen | 2021-07-13 |
| 11062877 | Apparatus of plural charged-particle beams | Shuai Li, Weiming Ren, Juying Dou, Xuerang Hu, Zhongwei Chen | 2021-07-13 |
| 11043354 | Apparatus of plural charged-particle beams | Weiming Ren, Shuai Li, Zhongwei Chen | 2021-06-22 |