Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11961698 | Replaceable module for a charged particle apparatus | Christiaan OTTEN, Peter-Paul CRANS, Marc Smits, Laura DEL TIN, Christan TEUNISSEN +5 more | 2024-04-16 |
| 11614416 | System and method for aligning electron beams in multi-beam inspection apparatus | Xuerang Hu, Qingpo Xi, Xuedong Liu, Weiming Ren | 2023-03-28 |
| 11328894 | Systems and methods for compensating dispersion of a beam separator in a single-beam or multi-beam apparatus | Weiming Ren, Xuedong Liu, Xuerang Hu, Zhongwei Chen | 2022-05-10 |