Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12278081 | System and method for alignment of secondary beams in multi-beam inspection apparatus | Xuerang Hu, Xuedong Liu, Weiming Ren, Zhong-Wei Chen | 2025-04-15 |
| 12191109 | Sample pre-charging methods and apparatuses for charged particle beam inspection | Xuedong Liu, Youfei Jiang, Weiming Ren, Xuerang Hu, Zhongwei Chen | 2025-01-07 |
| 12165830 | Multiple charged-particle beam apparatus with low crosstalk | Shichen GU, Weiming Ren | 2024-12-10 |
| 12033830 | Multiple charged-particle beam apparatus with low crosstalk | Weiming Ren, Xuerang Hu, Xuedong Liu | 2024-07-09 |
| 11961698 | Replaceable module for a charged particle apparatus | Christiaan OTTEN, Peter-Paul CRANS, Marc Smits, Laura DEL TIN, Christan TEUNISSEN +5 more | 2024-04-16 |
| 11676792 | Sample pre-charging methods and apparatuses for charged particle beam inspection | Xuedong Liu, Youfei Jiang, Weiming Ren, Xuerang Hu, Zhongwei Chen | 2023-06-13 |
| 11614416 | System and method for aligning electron beams in multi-beam inspection apparatus | Xuerang Hu, Xinan Luo, Xuedong Liu, Weiming Ren | 2023-03-28 |
| 11469074 | Multiple charged-particle beam apparatus with low crosstalk | Weiming Ren, Xuerang Hu, Xuedong Liu | 2022-10-11 |
| 9605759 | Metal seal for ultra high vacuum system | Tao Li, Feng Cao, Fumin He, Zhongwei Chen | 2017-03-28 |
| 9581245 | Metal seal for ultra high vacuum system | Tao Li, Feng Cao, Fumin He, Zhongwei Chen | 2017-02-28 |
| 8895935 | High efficiency secondary and back scattered electron detector | Zhibin Wang, Wei He, Shuai Li, Fumin He | 2014-11-25 |
| 7960697 | Electron beam apparatus | Zhongwei Chen, Weiming Ren, Joe Wang, Xuedong Liu, Juying Dou +5 more | 2011-06-14 |