Issued Patents All Time
Showing 26–50 of 99 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11688580 | Apparatus of plural charged-particle beams | Xuedong Liu, Shuai Li, Zhongwei Chen | 2023-06-27 |
| 11676793 | Apparatus of plural charged particle beams | Xuedong Liu, Xuerang Hu, Zhong-Wei Chen | 2023-06-13 |
| 11676792 | Sample pre-charging methods and apparatuses for charged particle beam inspection | Xuedong Liu, Qingpo Xi, Youfei Jiang, Xuerang Hu, Zhongwei Chen | 2023-06-13 |
| 11670477 | Apparatus using charged particle beams | Xuerang Hu, Xuedong Liu, Zhong-Wei Chen | 2023-06-06 |
| 11614416 | System and method for aligning electron beams in multi-beam inspection apparatus | Xuerang Hu, Xinan Luo, Qingpo Xi, Xuedong Liu | 2023-03-28 |
| 11594396 | Multi-beam inspection apparatus with single-beam mode | Xuedong Liu, Xuerang Hu, Zhong-Wei Chen | 2023-02-28 |
| 11587758 | Apparatus of plural charged-particle beams | Xuedong Liu, Xuerang Hu, Zhongwei Chen | 2023-02-21 |
| 11538655 | Multi-beam inspection apparatus | Xuerang Hu, Xuedong Liu, Zhong-Wei Chen | 2022-12-27 |
| 11513087 | Systems and methods for voltage contrast defect detection | Xuedong Liu, Zhong-Wei Chen, Xiaoyu JI, Xiaoxue CHEN, Weimin Zhou +1 more | 2022-11-29 |
| 11469074 | Multiple charged-particle beam apparatus with low crosstalk | Xuerang Hu, Qingpo Xi, Xuedong Liu | 2022-10-11 |
| 11398368 | Apparatus of plural charged-particle beams | Xuedong Liu, Xuerang Hu, Zhongwei Chen | 2022-07-26 |
| 11328894 | Systems and methods for compensating dispersion of a beam separator in a single-beam or multi-beam apparatus | Xuedong Liu, Xuerang Hu, Xinan Luo, Zhongwei Chen | 2022-05-10 |
| 11302514 | Apparatus for multiple charged-particle beams | Xuedong Liu, Xuerang Hu, Zong-wei Chen | 2022-04-12 |
| 11295930 | Method and apparatus for charged particle detection | Yongxin Wang, Zhonghua Dong, Zhongwei Chen | 2022-04-05 |
| 11289304 | Apparatus using multiple beams of charged particles | Xuerang Hu, Xuedong Liu, Zhong-Wei Chen | 2022-03-29 |
| 11282675 | Multi-beam inspection apparatus with improved detection performance of signal electrons | Xuedong Liu, Xuerang Hu, Zhong-Wei Chen | 2022-03-22 |
| 11232928 | Multi-beam inspection apparatus | Qian Zhang, Xuerang Hu, Xuedong Liu | 2022-01-25 |
| 11217423 | Apparatus of plural charged-particle beams | Shuai Li, Xuedong Liu, Zhongwei Chen, Jack Jau | 2022-01-04 |
| 11107657 | Apparatus of plural charged-particle beams | Shuai Li, Xuedong Liu, Zhongwei Chen | 2021-08-31 |
| 11062874 | Apparatus using multiple charged particle beams | Xuedong Liu, Xuerang Hu, Zhong-Wei Chen | 2021-07-13 |
| 11062877 | Apparatus of plural charged-particle beams | Shuai Li, Xuedong Liu, Juying Dou, Xuerang Hu, Zhongwei Chen | 2021-07-13 |
| 11043354 | Apparatus of plural charged-particle beams | Xuedong Liu, Shuai Li, Zhongwei Chen | 2021-06-22 |
| 10892138 | Multi-beam inspection apparatus with improved detection performance of signal electrons | Xuedong Liu, Xuerang Hu, Zhong-Wei Chen | 2021-01-12 |
| 10879032 | Multi-beam inspection apparatus | Xuerang Hu, Xuedong Liu, Zhong-Wei Chen | 2020-12-29 |
| 10879031 | Apparatus of plural charged-particle beams | Xuedong Liu, Xuerang Hu, Zhongwei Chen | 2020-12-29 |