Issued Patents All Time
Showing 26–38 of 38 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7639864 | Method, program product and apparatus for optimizing illumination for full-chip layer | Jang Fung Chen | 2009-12-29 |
| 7594199 | Method of optical proximity correction design for contact hole mask | Xuelong Shi, Douglas Broeke, Jang Fung Chen | 2009-09-22 |
| 7548302 | Lithographic apparatus and device manufacturing method | Arno Jan Bleeker, Donis Flagello, James Greeneich, Kars Zeger Troost | 2009-06-16 |
| 7506299 | Feature optimization using interference mapping lithography | Xuelong Shi, Douglas Broeke, Jang Fung Chen | 2009-03-17 |
| 7493589 | Method, program product and apparatus for model based geometry decomposition for use in a multiple exposure process | — | 2009-02-17 |
| 7398508 | Eigen decomposition based OPC model | Xuelong Shi, Thomas Laidig, Douglas Van Den Broeke | 2008-07-08 |
| 7317506 | Variable illumination source | Donis Flagello, James Greeneich | 2008-01-08 |
| 7292315 | Optimized polarization illumination | Donis Flagello, Steve Hansen | 2007-11-06 |
| 6887625 | Assist features for use in lithographic projection | Johannes Jacobus Matheus Baselmans, Markus Schluter, Donis Flagello | 2005-05-03 |
| 6871337 | Illumination optimization for specific mask patterns | — | 2005-03-22 |
| 4462323 | Presser foot lift for needle feed in a sewing machine | — | 1984-07-31 |
| 4406236 | Needle shift warning arrangement in an electronically controlled sewing machine | — | 1983-09-27 |
| 4342271 | Stitch length range indicating arrangement in a multiple pattern sewing machine | — | 1982-08-03 |