Issued Patents All Time
Showing 26–50 of 51 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10133188 | Metrology method, target and substrate | Arie Jeffrey Den Boef, Martin Ebert | 2018-11-20 |
| 10042268 | Method, apparatus and substrates for lithographic metrology | Hendrik Jan Hidde Smilde, Arie Jeffrey Den Boef, Omer Abubaker Omer Adam | 2018-08-07 |
| 9940703 | Method of measuring a property of a target structure, inspection apparatus, lithographic system and device manufacturing method | Murat Bozkurt, Patricius Aloysius Jacobus Tinnemans | 2018-04-10 |
| 9811003 | Metrology method and apparatus, substrate, lithographic system and device manufacturing method | Armand Eugene Albert Koolen, Hendrik Jan Hidde Smilde | 2017-11-07 |
| 9805666 | Liquid crystal display system and method | Jurgen Jean Louis Hoppenbrouwers, Wilhelmus Henricus Maria Van Beek | 2017-10-31 |
| 9753296 | Illumination system, inspection apparatus including such an illumination system, inspection method and manufacturing method | Gerbrand Van Der Zouw, Martin Ebert | 2017-09-05 |
| 9726989 | Spectral purity filter | Wouter Anthon Soer, Vadim Yevgenyevich Banine, Erik Roelof Loopstra, Andrei Mikhailovich Yakunin | 2017-08-08 |
| 9633427 | Method of measuring a property of a target structure, inspection apparatus, lithographic system and device manufacturing method | Murat Bozkurt, Patricius Aloysius Jacobus Tinnemans | 2017-04-25 |
| 9535338 | Metrology method and apparatus, substrate, lithographic system and device manufacturing method | Armand Eugene Albert Koolen, Hendrik Jan Hidde Smilde | 2017-01-03 |
| 9195144 | Spectral purity filter, radiation source, lithographic apparatus, and device manufacturing method | Vadim Yevgenyevich Banine, Maarten Marinus Johannes Wilhelmus Van Herpen, Wouter Anthon Soer, Andrei Mikhailovich Yakunin | 2015-11-24 |
| 9195152 | Spectral purity filter, lithographic apparatus, and method for manufacturing a spectral purity filter | Wouter Anthon Soer, Andrei Mikhailovich Yakunin, Denny Mathew, Hendrik Jan Kettelarij, Fredericus Christiaan Van Den Heuvel +1 more | 2015-11-24 |
| 9163935 | Device manufacturing method and associated lithographic apparatus, inspection apparatus, and lithographic processing cell | Arie Jeffrey Den Boef, Kaustuve Bhattacharyya, Michael Kubis | 2015-10-20 |
| 9041912 | Spectral purity filters for use in a lithographic apparatus | Wouter Anthon Soer, Vadim Yevgenyevich Banine, Maarten Marinus Johannes Wilhelmus Van Herpen, Andrey Mikhailovich Yakunin | 2015-05-26 |
| 8817237 | Spectral purity filter, lithographic apparatus, and method for manufacturing a spectral purity filter | Wouter Anthon Soer, Ronald Dekker | 2014-08-26 |
| 8742381 | Radiation source with cleaning apparatus | Vadim Yevgenyevich Banine, Maarten Marinus Johannes Wilhelmus Van Herpen, Wouter Anthon Soer | 2014-06-03 |
| 8459830 | Light output device with partly transparent mirror | Ramon Pascal Van Gorkom, Arij Jonathan Rijke | 2013-06-11 |
| 8405051 | Method for removing a deposition on an uncapped multilayer mirror of a lithographic apparatus, lithographic apparatus and device manufacturing method | Vadim Yevgenyevich Banine, Maarten Marinus Johannes Wilhelmus Van Herpen, Wouter Anthon Soer | 2013-03-26 |
| 8400627 | Photo-detector and method of measuring light | Theodorus Johannes Petrus Van Den Biggelaar, Eduard Johannes Meijer, Eugene Timmering | 2013-03-19 |
| 8390788 | Spectral purity filters for use in a lithographic apparatus | Wouter Anthon Soer, Vadim Yevgenyevich Banine, Maarten Marinus Johannes Wilhelmus Van Herpen, Andrey Mikhailovich Yakunin | 2013-03-05 |
| 8263950 | Radiation source | Wouter Anthon Soer, Maarten Marinus Johannes Wilhelmus Van Herpen, Kurt Gielissen | 2012-09-11 |
| 8248393 | Spectrum sequential display having reduced cross talk | Gerben Johan Hekstra, Nalliah Raman, Claus Cordes, Jurgen Jean Louis Hoppenbrouwers, Oleg Belik | 2012-08-21 |
| 8189011 | System and method for controlling lighting systems | Bartel Marinus Van De Sluis, Galileo June Destura | 2012-05-29 |
| 7952084 | Radiation source and lithographic apparatus | Wouter Anthon Soer, Maarten Marinus Johannes Wilhelmus Van Herpen | 2011-05-31 |
| 7742034 | Color display | Gerben Johan Hekstra | 2010-06-22 |
| 7626643 | Waveguide for autostereoscopic display having a plurality of switchable portions of diffusive material within the waveguide for providing either scattering or light-transmissive light to the display | Willem Lubertus Ijzerman | 2009-12-01 |