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Lithographic apparatus and device manufacturing method |
Hans Jansen, Johannes Jacobus Matheus Baselmans, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Jeroen Johannes Sophia Maria Mertens +4 more |
2019-12-17 |
| 10061207 |
Method for preventing or reducing contamination of an immersion type projection apparatus and an immersion type lithographic apparatus |
— |
2018-08-28 |
| 9703210 |
Lithographic apparatus and device manufacturing method |
Hans Jansen, Johannes Jacobus Matheus Baselmans, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Jeroen Johannes Sophia Maria Mertens +4 more |
2017-07-11 |
| 8941811 |
Lithographic apparatus and device manufacturing method |
Hans Jansen, Johannes Jacobus Matheus Baselmans, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Jeroen Johannes Sophia Maria Mertens +4 more |
2015-01-27 |
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Lithographic apparatus and device manufacturing method |
Thijs Egidius Johannes Knaapen, Richard Joseph Bruls, Youri Johannes Laurentius Maria Van Dommelen, Johannes Henricus Wilhelmus Jacobs, Martijn Hendrik Kamphuis +10 more |
2014-07-15 |
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Lithographic apparatus and device manufacturing method |
Hans Jansen, Johannes Jacobus Matheus Baselmans, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Jeroen Johannes Sophia Maria Mertens +4 more |
2014-01-28 |
| 8514365 |
Lithographic apparatus and device manufacturing method |
Frederik Eduard De Jong, Marcel Hendrikus Maria Beems, Marinus Aart Van Den Brink, Johannes Henricus Wilhelmus Jacobs, Martinus Hendrikus Antonius Leenders +10 more |
2013-08-20 |
| 8125610 |
Method for preventing or reducing contamination of an immersion type projection apparatus and an immersion type lithographic apparatus |
— |
2012-02-28 |
| 8115899 |
Lithographic apparatus and device manufacturing method |
Hans Jansen, Johannes Jacobus Matheus Baselmans, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Jeroen Johannes Sophia Maria Mertens +4 more |
2012-02-14 |
| 7880860 |
Lithographic apparatus and device manufacturing method |
Hans Jansen, Johannes Jacobus Matheus Baselmans, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Jeroen Johannes Sophia Maria Mertens +4 more |
2011-02-01 |
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Magnetic sensor for input devices |
Hans Van Zon, Jaap Ruigrok |
2010-04-27 |
| 7656502 |
Lithographic apparatus and device manufacturing method |
Harmen Klaus Van Der Schoot, Noud Jan Gilissen, Peter Paul Steijaert, Erik Roelof Loopstra, Nicolaas Rudolf Kemper +8 more |
2010-02-02 |