| 7377764 |
Imprint lithography |
Yvonne Wendela Kruijt-Stegeman, Erik Roelof Loopstra, Johan Frederik Dijksman, Helmar Van Santen, Sander Frederik Wuister |
2008-05-27 |
| 7372541 |
Lithographic apparatus and device manufacturing method |
Joeri Lof, Antonius Theodorus Anna Maria Derksen, Christiaan Alexander Hoogendam, Erik Roelof Loopstra, Theodorus Marinus Modderman +8 more |
2008-05-13 |
| 7354698 |
Imprint lithography |
Helmar Van Santen, Jacobus Hermanus Maria Neijzen, Emile Johannes Karel Verstegen |
2008-04-08 |
| 7213963 |
Lithographic apparatus and device manufacturing method |
Joeri Lof, Erik Theodorus Maria Bijlaart, Roelof Aeilko Siebrand Ritsema, Frank Van Schaik, Timotheus Franciscus Sengers +16 more |
2007-05-08 |
| 7199858 |
Lithographic apparatus and device manufacturing method |
Joeri Lof, Erik Theodorus Maria Bijlaart, Hans Butler, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam +12 more |
2007-04-03 |
| 7193229 |
Lithographic apparatus, illumination system and method for mitigating debris particles |
Vadim Yevgenyevich Banine, Levinus Pieter Bakker, Johannes Hubertus Josephina Moors, Frank Jeroen Pieter Schuurmans |
2007-03-20 |
| 7119874 |
Lithographic apparatus and device manufacturing method |
Henrikus Herman Marie Cox, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Erik Roelof Loopstra, Helmar Van Santen |
2006-10-10 |
| 7075617 |
Device manufacturing method and a lithographic apparatus |
Ralph Kurt, Carolus Ida Maria Antonius Spee |
2006-07-11 |
| 7050146 |
Lithographic apparatus and device manufacturing method |
Paulus Cornelis Duineveld, Peter Dirksen, Helmar Van Santen |
2006-05-23 |
| 7012673 |
Lithographic apparatus and device manufacturing method |
Jan Evert Van Der Werf |
2006-03-14 |
| 6952253 |
Lithographic apparatus and device manufacturing method |
Joeri Lof, Antonius Theodorus Anna Maria Derksen, Christiaan Alexander Hoogendam, Erik Roelof Loopstra, Theodorus Marinus Modderman +7 more |
2005-10-04 |
