| 9482962 |
Lithographic apparatus and device manufacturing method |
Christiaan Alexander Hoogendam, Bob Streefkerk, Johannes Catharinus Hubertus Mulkens, Erik Theodorus Maria Bijlaart, Erik Roelof Loopstra +4 more |
2016-11-01 |
| 9465301 |
Lithographic apparatus and device manufacturing method |
Helmar Van Santen |
2016-10-11 |
| 9366972 |
Lithographic apparatus and device manufacturing method |
Joeri Lof, Hans Butler, Sjoerd Nicolaas Lambertus Donders, Erik Roelof Loopstra, Hendricus Johannes Maria Meijer +9 more |
2016-06-14 |
| 9341944 |
Imprint lithography |
Helmar Van Santen, Yvonne Wendela Kruijt-Stegeman |
2016-05-17 |
| 9207543 |
Lithographic apparatus and device manufacturing method involving a groove to collect liquid |
Johannes Jacobus Matheus Baselmans, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Hans Jansen, Jeroen Johannes Sophia Maria Mertens +5 more |
2015-12-08 |
| 9091940 |
Lithographic apparatus and method involving a fluid inlet and a fluid outlet |
Antonius Theodorus Anna Maria Derksen, Christiaan Alexander Hoogendam, Joeri Lof, Erik Roelof Loopstra, Theodorus Marinus Modderman +7 more |
2015-07-28 |
| 9081299 |
Lithographic apparatus and device manufacturing method involving removal of liquid entering a gap |
Joeri Lof, Erik Theodorus Maria Bijlaart, Roelof Aeilko Siebrand Ritsema, Frank Van Schaik, Timotheus Franciscus Sengers +16 more |
2015-07-14 |
| 9057967 |
Lithographic apparatus and device manufacturing method |
Joeri Lof, Hans Butler, Sjoerd Nicolaas Lambertus Donders, Erik Roelof Loopstra, Hendricus Johannes Maria Meijer +9 more |
2015-06-16 |
| 8860923 |
Lithographic apparatus and device manufacturing method |
Christiaan Alexander Hoogendam, Bob Streefkerk, Johannes Catharinus Hubertus Mulkens, Erik Theodorus Maria Bijlaart, Erik Roelof Loopstra +4 more |
2014-10-14 |
| 8797503 |
Lithographic apparatus and device manufacturing method with a liquid inlet above an aperture of a liquid confinement structure |
Joeri Lof, Antonius Theodorus Anna Maria Derksen, Christiaan Alexander Hoogendam, Erik Roelof Loopstra, Theodorus Marinus Modderman +7 more |
2014-08-05 |
| 8767171 |
Lithographic apparatus and device manufacturing method |
Helmar Van Santen |
2014-07-01 |
| 8755033 |
Lithographic apparatus and device manufacturing method involving a barrier to collect liquid |
Johannes Jacobus Matheus Baselmans, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Hans Jansen, Jeroen Johannes Sophia Maria Mertens +5 more |
2014-06-17 |
| 8753557 |
Imprint lithography |
Yvonne Wendela Kruijt-Stegeman, Johan Frederik Dijksman, Karel Diederick Van Der Mast, Klaus Simon, Raymond Jacobus Wilhelmus Knaapen +2 more |
2014-06-17 |
| 8704998 |
Lithographic apparatus and device manufacturing method involving a barrier to collect liquid |
Johannes Jacobus Matheus Baselmans, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Hans Jansen, Jeroen Johannes Sophia Maria Mertens +5 more |
2014-04-22 |
| 8638418 |
Lithographic apparatus |
Christiaan Alexander Hoogendam, Bob Streefkerk, Johannes Catharinus Hubertus Mulkens, Erik Theodorus Maria Bijlaart, Erik Roelof Loopstra +4 more |
2014-01-28 |
| 8558989 |
Lithographic apparatus and device manufacturing method |
Joeri Lof, Erik Theodorus Maria Bijlaart, Hans Butler, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam +12 more |
2013-10-15 |
| 8542343 |
Lithographic apparatus |
Christiaan Alexander Hoogendam, Bob Streefkerk, Johannes Catharinus Hubertus Mulkens, Erik Theodorus Maria Bijlaart, Erik Roelof Loopstra +4 more |
2013-09-24 |
| 8542344 |
Lithographic apparatus and device manufacturing method |
Christiaan Alexander Hoogendam, Bob Streefkerk, Johannes Catharinus Hubertus Mulkens, Erik Theodorus Maria Bijlaart, Erik Roelof Loopstra +4 more |
2013-09-24 |
| 8482845 |
Lithographic apparatus and device manufacturing method |
Joeri Lof, Erik Theodorus Maria Bijlaart, Roelof Aeilko Siebrand Ritsema, Frank Van Schaik, Timotheus Franciscus Sengers +16 more |
2013-07-09 |
| 8472002 |
Lithographic apparatus and device manufacturing method |
Joeri Lof, Erik Theodorus Maria Bijlaart, Hans Butler, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam +12 more |
2013-06-25 |
| 8441629 |
Optical detection system for monitoring rtPCR reaction |
Jorrit Ernst De Vries, Jozef C. M. Versleegers, Michiel De Jong, Theodoor Bastiaan Johannes Haddeman, Louis Stroucken |
2013-05-14 |
| 8349238 |
Imprint lithography |
Peter Bartus Leonard Meijer |
2013-01-08 |
| 8241550 |
Imprint lithography |
Helmar Van Santen, Yvonne Wendela Kruijt-Stegeman |
2012-08-14 |
| 8208120 |
Lithographic apparatus and device manufacturing method |
Joeri Lof, Antonius Theodorus Anna Maria Derksen, Christiaan Alexander Hoogendam, Erik Roelof Loopstra, Theodorus Marinus Modderman +8 more |
2012-06-26 |
| 8154708 |
Lithographic apparatus and device manufacturing method |
Joeri Lof, Hans Butler, Sjoerd Nicolaas Lambertus Donders, Erik Roelof Loopstra, Hendricus Johannes Maria Meijer +16 more |
2012-04-10 |
