Patents per Year
Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 12255055 | Integrated cleaning process for substrate etching | Seul Ki Ahn, Seung-Young Son, Li-Te Chang, Sunil Srinivasan, Rajinder Dhindsa | 2025-03-18 | |
| 11702738 | Chamber processes for reducing backside particles | Xinyue Chen, Mukul Khosla, Yangchung Lee | 2023-07-18 | $58,990,000 |
| 11521838 | Integrated cleaning process for substrate etching | Seul Ki Ahn, Seung-Young Son, Li-Te Chang, Sunil Srinivasan, Rajinder Dhindsa | 2022-12-06 | $44,170,000 |
| 10217627 | Methods of non-destructive post tungsten etch residue removal | Danny Lu, Changhun Lee | 2019-02-26 | $27,960,000 |
| 9885567 | Substrate placement detection in semiconductor equipment using thermal response characteristics | Jared Ahmad Lee, Martin Jeffrey Salinas, Changhun Lee | 2018-02-06 | $31,277,000 |
| 6120350 | Process for reconditioning polishing pads | Eugene C. Davis | 2000-09-19 | $21,858,000 |