Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11702738 | Chamber processes for reducing backside particles | Yi Zhou, Xinyue Chen, Mukul Khosla | 2023-07-18 |
| 10497567 | Method of enhanced selectivity of hard mask using plasma treatments | Hailong Zhou, Chain Lee, Hui Sun, Jonathan Kim | 2019-12-03 |