Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12255055 | Integrated cleaning process for substrate etching | Yi Zhou, Seung-Young Son, Li-Te Chang, Sunil Srinivasan, Rajinder Dhindsa | 2025-03-18 |
| 11521838 | Integrated cleaning process for substrate etching | Yi Zhou, Seung-Young Son, Li-Te Chang, Sunil Srinivasan, Rajinder Dhindsa | 2022-12-06 |
| 9653311 | 3D NAND staircase CD fabrication utilizing ruthenium material | Seung-Young Son, Gill Yong Lee | 2017-05-16 |