Issued Patents All Time
Showing 51–60 of 60 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7264688 | Plasma reactor apparatus with independent capacitive and toroidal plasma sources | Alexander Paterson, Theodoros Panagopoulos, Brian K. Hatcher, Dan Katz, Edward P. Hammond, IV +2 more | 2007-09-04 |
| 6893533 | Plasma reactor having a symmetric parallel conductor coil antenna | John Holland, Michael Barnes | 2005-05-17 |
| 6818562 | Method and apparatus for tuning an RF matching network in a plasma enhanced semiconductor wafer processing system | John Holland, Nicolas Gani | 2004-11-16 |
| 6727655 | Method and apparatus to monitor electrical states at a workpiece in a semiconductor processing chamber | Jon McChesney, Alex Paterson, John Holland, Michael Barnes | 2004-04-27 |
| 6694915 | Plasma reactor having a symmetrical parallel conductor coil antenna | John Holland, Michael Barnes | 2004-02-24 |
| 6685798 | Plasma reactor having a symmetrical parallel conductor coil antenna | John Holland, Michael Barnes | 2004-02-03 |
| 6472822 | Pulsed RF power delivery for plasma processing | Jin-Yuan Chen, John Holland, Arthur H. Sato | 2002-10-29 |
| 6462481 | Plasma reactor having a symmetric parallel conductor coil antenna | John Holland, Michael Barnes | 2002-10-08 |
| 6414648 | Plasma reactor having a symmetric parallel conductor coil antenna | John Holland, Michael Barnes | 2002-07-02 |
| 6409933 | Plasma reactor having a symmetric parallel conductor coil antenna | John Holland, Michael Barnes | 2002-06-25 |