Issued Patents All Time
Showing 51–56 of 56 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7186319 | Multi-track magnetron exhibiting more uniform deposition and reduced rotational asymmetry | Hong Yang, Jian Lei, Ted Guo | 2007-03-06 |
| 7041201 | Sidewall magnet improving uniformity of inductively coupled plasma and shields used therewith | Xianmin Tang, John C. Forster, Peijun Ding, Marc Schweitzer, Keith A. Miller +1 more | 2006-05-09 |
| 7018515 | Selectable dual position magnetron | Hong Yang, Anantha K. Subramani, Maurice E. Ewert, Keith A. Miller, Vincent E. Burkhart | 2006-03-28 |
| 6663754 | Tubular magnet as center pole in unbalanced sputtering magnetron | — | 2003-12-16 |
| 6495009 | Auxiliary in-plane magnet inside a nested unbalanced magnetron | — | 2002-12-17 |
| 6491801 | Auxiliary vertical magnet outside a nested unbalanced magnetron | — | 2002-12-10 |