Issued Patents All Time
Showing 26–41 of 41 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6257045 | Automated substrate processing systems and methods | Akihiro Hosokawa, Makoto Inagawa, Ravi Mullapudi, Harlan L. Halsey, Michael T. Starr | 2001-07-10 |
| 6205870 | Automated substrate processing systems and methods | Akihiro Hosokawa, Makoto Inagawa, Ravi Mullapudi, Harlan L. Halsey, Michael T. Starr | 2001-03-27 |
| 6199259 | Autoclave bonding of sputtering target assembly | Manuel J. Herrera | 2001-03-13 |
| 6033483 | Electrically insulating sealing structure and its method of use in a high vacuum physical vapor deposition apparatus | Manuel J. Herrera, David F. Eline, Chandra Deshpandey | 2000-03-07 |
| 5855744 | Non-planar magnet tracking during magnetron sputtering | Harlan I. Halsey, Russell Weldon Black, Akihiro Hosokawa, Allan De Salvo, Victoria L. Hall | 1999-01-05 |
| 5799860 | Preparation and bonding of workpieces to form sputtering targets and other assemblies | Akihiro Hosokawa, Manuel J. Herrera | 1998-09-01 |
| 5676803 | Sputtering device | Manuel J. Herrera, David E. Berkstresser | 1997-10-14 |
| 5603816 | Sputtering device and target with cover to hold cooling fluid | Manuel J. Herrera, David E. Berkstresser | 1997-02-18 |
| 5595337 | Sputtering device and target with cover to hold cooling fluid | Manuel J. Herrera, David E. Berkstresser | 1997-01-21 |
| 5565071 | Integrated sputtering target assembly | David E. Berkstresser, Manuel J. Herrera | 1996-10-15 |
| 5518593 | Shield configuration for vacuum chamber | Akihiro Hosokawa, David E. Berkstresser | 1996-05-21 |
| 5487822 | Integrated sputtering target assembly | David E. Berkstresser, Manuel J. Herrera | 1996-01-30 |
| 5433835 | Sputtering device and target with cover to hold cooling fluid | Manuel J. Herrera, David E. Berkstresser | 1995-07-18 |
| 5252194 | Rotating sputtering apparatus for selected erosion | John C. Helmer, Robert L. Anderson, Young H. Park, Ronald R. Cochran, Vance E. Hoffman, Jr. | 1993-10-12 |
| 4834860 | Magnetron sputtering targets | Gary B. Crumley | 1989-05-30 |
| 4676994 | Adherent ceramic coatings | — | 1987-06-30 |