| 8152442 |
Centripetal pumping stage and vacuum pump incorporating such pumping stage |
Silvio Giors |
2012-04-10 |
| 8070419 |
Spiral pumping stage and vacuum pump incorporating such pumping stage |
Silvio Giors |
2011-12-06 |
| 6024843 |
Sputtering apparatus with a rotating magnet array having a geometry for specified target erosion profile |
Robert L. Anderson |
2000-02-15 |
| 5635036 |
Collimated deposition apparatus and method |
R. Ernest Demaray, Vance E. Hoffman, Jr., Young H. Park, Ronald R. Cochran |
1997-06-03 |
| 5482611 |
Physical vapor deposition employing ion extraction from a plasma |
Kwok Fai Lai, Robert L. Anderson |
1996-01-09 |
| 5456575 |
Non-centric improved pumping stage for turbomolecular pumps |
Giampaolo Levi |
1995-10-10 |
| 5449270 |
Tangential flow pumping channel for turbomolecular pumps |
Giampaolo Levi |
1995-09-12 |
| 5330628 |
Collimated deposition apparatus and method |
R. Ernest Demaray, Vance E. Hoffman, Jr., Young H. Park, Ronald R. Cochran |
1994-07-19 |
| 5252194 |
Rotating sputtering apparatus for selected erosion |
Richard E. Demaray, Robert L. Anderson, Young H. Park, Ronald R. Cochran, Vance E. Hoffman, Jr. |
1993-10-12 |
| 5235409 |
Optical detection system for capillary separation columns |
Dean S. Burgi, Ring-Ling Chien |
1993-08-10 |
| 4995958 |
Sputtering apparatus with a rotating magnet array having a geometry for specified target erosion profile |
Robert L. Anderson |
1991-02-26 |
| 4774437 |
Inverted re-entrant magnetron ion source |
Kenneth J. Doniger |
1988-09-27 |
| 4629548 |
Planar penning magnetron sputtering device |
— |
1986-12-16 |
| 4606806 |
Magnetron sputter device having planar and curved targets |
— |
1986-08-19 |
| 4437812 |
Single-pump multiple stroke proportioning for gradient elution liquid chromatography |
Ahmad Abu-Shumays, Stephen J. Luchetti |
1984-03-20 |