Issued Patents All Time
Showing 26–46 of 46 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10727033 | Biasable flux optimizer / collimator for PVD sputter chamber | Fuhong Zhang, Anthony Infante, Zheng Wang | 2020-07-28 |
| D869409 | Target profile for a physical vapor deposition chamber target | Fuhong Zhang, Xiaodong Wang | 2019-12-10 |
| D868124 | Target profile for a physical vapor deposition chamber target | Fuhong Zhang, Zheng Wang | 2019-11-26 |
| 10438828 | Methods and apparatus to prevent interference between processing chambers | Fuhong Zhang, Sunil Kumar Garg, Paul Kiely, William Fruchterman, Zheng Wang +1 more | 2019-10-08 |
| D859333 | Collimator for a physical vapor deposition chamber | Lanlan Zhong, Fuhong Zhang, Zheng Wang | 2019-09-10 |
| D858468 | Collimator for a physical vapor deposition chamber | Lanlan Zhong, Fuhong Zhang, Zheng Wang | 2019-09-03 |
| 10347474 | Biasable flux optimizer / collimator for PVD sputter chamber | Fuhong Zhang, Anthony Infante, Zheng Wang | 2019-07-09 |
| 10312065 | Physical vapor deposition (PVD) plasma energy control per dynamic magnetron control | Keith A. Miller, Shreekant Gayaka, Carl Johnson | 2019-06-04 |
| D837755 | Target profile for a physical vapor deposition chamber target | Fuhong Zhang, Yu Liu | 2019-01-08 |
| D836572 | Target profile for a physical vapor deposition chamber target | Fuhong Zhang, Xiaodong Wang | 2018-12-25 |
| 9960021 | Physical vapor deposition (PVD) target having low friction pads | Uday Pai, William Fruchterman, Keith A. Miller, Muhammad M. Rasheed, Thanh X. Nguyen +1 more | 2018-05-01 |
| 9960024 | Biasable flux optimizer / collimator for PVD sputter chamber | Fuhong Zhang, Anthony Infante, Zheng Wang | 2018-05-01 |
| D801942 | Target profile for a physical vapor deposition chamber target | Fuhong Zhang, Yu Liu | 2017-11-07 |
| 9580795 | Sputter source for use in a semiconductor process chamber | Keith A. Miller | 2017-02-28 |
| 9543126 | Collimator for use in substrate processing chambers | — | 2017-01-10 |
| 9476122 | Wafer processing deposition shielding components | Keith A. Miller, Anantha K. Subramani | 2016-10-25 |
| 9062379 | Wafer processing deposition shielding components | Keith A. Miller, Anantha K. Subramani | 2015-06-23 |
| 8980045 | Substrate cleaning chamber and components | Wei Wang | 2015-03-17 |
| 8696878 | Wafer processing deposition shielding components | Keith A. Miller, Anantha K. Subramani | 2014-04-15 |
| 8559159 | Electrostatic chuck and methods of use thereof | Shambhu N. Roy, Keith A. Miller, Vijay D. Parkhe, Steven V. Sansoni | 2013-10-15 |
| 7942969 | Substrate cleaning chamber and components | Wei Wang | 2011-05-17 |