Issued Patents All Time
Showing 101–105 of 105 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6635583 | Silicon carbide deposition for use as a low-dielectric constant anti-reflective coating | Joe Feng, Mei-Yee Shek, Chris Ngai, Judy H. Huang | 2003-10-21 |
| 6573030 | Method for depositing an amorphous carbon layer | Kevin Fairbairn, Michael R. Rice, Timothy Weidman, Christopher S. Ngai, Ian Latchford +1 more | 2003-06-03 |
| 6541397 | Removable amorphous carbon CMP stop | — | 2003-04-01 |
| 6365518 | Method of processing a substrate in a processing chamber | Albert Lee, Chris Ngai, Tom Nowak | 2002-04-02 |
| 6355571 | Method and apparatus for reducing copper oxidation and contamination in a semiconductor device | Judy H. Huang, Sudha Rathi, Christopher S. Ngai, Bok Hoen Kim | 2002-03-12 |