Issued Patents All Time
Showing 26–33 of 33 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6033480 | Wafer edge deposition elimination | Karl A. Littau, Dashun Steve Zhou | 2000-03-07 |
| 5908334 | Electrical connector for power transmission in an electrostatic chuck | Vijay D. Parkhe, Sergio Edelstein | 1999-06-01 |
| 5906683 | Lid assembly for semiconductor processing chamber | Salvador P. Umotoy | 1999-05-25 |
| 5868847 | Clamp ring for shielding a substrate during film layer deposition | Zheng Xu, Howard Grunes, Avi Tepman, Igor Kogan | 1999-02-09 |
| 5763851 | Slotted RF coil shield for plasma deposition system | John C. Forster, Howard Grunes, Robert B. Lowrance, Ralf Hofmann, Zheng Xu +1 more | 1998-06-09 |
| 5759287 | Method of purging and passivating a semiconductor processing chamber | Robert A. Chapman | 1998-06-02 |
| 5691876 | High temperature polyimide electrostatic chuck | Vijay D. Parkhe, Sergio Edelstein | 1997-11-25 |
| 5536330 | Method of purging and pumping vacuum chamber to ultra-high vacuum | Robert A. Chapman | 1996-07-16 |