Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5830808 | Plasma reactor with magnet for protecting an electroacoustic chuck from the plasma | — | 1998-11-03 |
| 5759287 | Method of purging and passivating a semiconductor processing chamber | Aihua Chen | 1998-06-02 |
| 5536330 | Method of purging and pumping vacuum chamber to ultra-high vacuum | Aihua Chen | 1996-07-16 |
| 5484485 | Plasma reactor with magnet for protecting an electrostatic chuck from the plasma | — | 1996-01-16 |
| 4512667 | Portable information device having an output related to natural physical events | Romm Doulton | 1985-04-23 |
| 4206414 | Electrical synchronizing circuits | — | 1980-06-03 |