Issued Patents All Time
Showing 51–73 of 73 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6537926 | Process for improving the thickness uniformity of a thin oxide layer in semiconductor wafer fabrication | Helmut Tews | 2003-03-25 |
| 6528384 | Method for manufacturing a trench capacitor | Gustav Beckmann, Moritz Haupt, Anke Krasemann, Alexandra Lamprecht, Dietmar Ottenwalder +1 more | 2003-03-04 |
| 6509599 | Trench capacitor with insulation collar and method for producing the trench capacitor | Kai Wurster, Jurgen Faul, Klaus-Dieter Morhard, Alexandra Lamprecht, Odile Dequiedt | 2003-01-21 |
| 6500707 | Method for manufacturing a trench capacitor of a memory cell of a semiconductor memory | — | 2002-12-31 |
| 6465370 | Low leakage, low capacitance isolation material | Rolf-Peter Vollertsen, Joachim Hoepfner | 2002-10-15 |
| 6436846 | Combined preanneal/oxidation step using rapid thermal processing | Helmut Tews, Thomas Gaertner | 2002-08-20 |
| 6376348 | Reliable polycide gate stack with reduced sheet resistance and thickness | Matthias Ilg | 2002-04-23 |
| 6329703 | Contact between a monocrystalline silicon region and a polycrystalline silicon structure and method for producing such a contact | Kai Wurster, Klaus-Dieter Morhard, Joachim Hoepfner | 2001-12-11 |
| 6326262 | Method for fabricating epitaxy layer | Dietmar Temmler, Herbert Benzinger, Wolfram Karcher, Catharina Pusch, Jurgen Faul | 2001-12-04 |
| 6319788 | Semiconductor structure and manufacturing methods | Ulrike Gruening, Carl Radens | 2001-11-20 |
| 6310375 | Trench capacitor with isolation collar and corresponding manufacturing method | — | 2001-10-30 |
| 6265741 | Trench capacitor with epi buried layer | — | 2001-07-24 |
| 6235651 | Process for improving the thickness uniformity of a thin layer in semiconductor wafer fabrication | Helmut Tews | 2001-05-22 |
| 6200873 | Production method for a trench capacitor with an insulation collar | Norbert Arnold | 2001-03-13 |
| 6177696 | Integration scheme enhancing deep trench capacitance in semiconductor integrated circuit devices | Gary B. Bronner, Laertis Economikos, Rajarao Jammy, Byeongju Park, Carl Radens | 2001-01-23 |
| 6080273 | Method and device for treating liquids by partial evaporation | — | 2000-06-27 |
| 6068928 | Method for producing a polycrystalline silicon structure and polycrystalline silicon layer to be produced by the method | Kai Wurster, Klaus-Dieter Morhard, Joachim Hoepfner | 2000-05-30 |
| 6040211 | Semiconductors having defect denuded zones | — | 2000-03-21 |
| 6018174 | Bottle-shaped trench capacitor with epi buried layer | Jack A. Mandelman, Joachim Hoepfner, Herbert Schaefer, Reinhard Stengl | 2000-01-25 |
| 6008104 | Method of fabricating a trench capacitor with a deposited isolation collar | — | 1999-12-28 |
| 5991508 | Thermal processing apparatus with a shield between heater and substrate | Toshimitsu Ohmine | 1999-11-23 |
| 5945704 | Trench capacitor with epi buried layer | Jack A. Mandelman, Joachim Hoepfner, Herbert Schaefer, Reinhard Stengl | 1999-08-31 |
| 5516283 | Apparatus for processing a plurality of circular wafers | — | 1996-05-14 |