Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12319900 | Integral gas-introduction and stirring unit for gas-liquid reactors | Patrick BONGARTZ, Matthias Wessling | 2025-06-03 |
| 9898572 | Metal line layout based on line shifting | Thomas Melde, Matthias Lehr, Thomas Herrmann, Jens Hassmann, Rakesh Kumar Kuncha | 2018-02-20 |
| 9281252 | Method comprising applying an external mechanical stress to a semiconductor structure and semiconductor processing tool | Alexander Würfel | 2016-03-08 |
| 8575029 | Technique for forming metal lines in a semiconductor by adapting the temperature dependence of the line resistance | Matthias Lehr, Eckhard Langer | 2013-11-05 |
| 8329577 | Method of forming an alloy in an interconnect structure to increase electromigration resistance | Matthias Lehr, Eckhard Langer | 2012-12-11 |
| 8058731 | Technique for forming metal lines in a semiconductor by adapting the temperature dependence of the line resistance | Matthias Lehr, Eckhard Langer | 2011-11-15 |
| 8058081 | Method of testing an integrity of a material layer in a semiconductor structure | Eckhard Langer, Frank Koschinsky | 2011-11-15 |
| 8039395 | Technique for forming embedded metal lines having increased resistance against stress-induced material transport | Hans-Juergen Engelmann, Ehrenfried Zschech, Peter Huebler | 2011-10-18 |
| 7718447 | System and method for estimating the crystallinity of stacked metal lines in microstructures | Inka Zienert, Hartmut Prinz | 2010-05-18 |
| 7335880 | Technique for CD measurement on the basis of area fraction determination | Eckhard Langer | 2008-02-26 |
| 6953755 | Technique for monitoring the state of metal lines in microstructures | Ehrenfried Zschech, Eckhard Langer | 2005-10-11 |