Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7737021 | Resist trim process to define small openings in dielectric layers | Srikanteswara Dakshina-Murthy, Paul R. Besser, Eric M. Apelgren, Christian Zistl, Jeremy I. Martin +2 more | 2010-06-15 |
| 7329582 | Methods for fabricating a semiconductor device, which include selectively depositing an electrically conductive material | James Pan, Ming-Ren Lin | 2008-02-12 |
| 6514844 | Sidewall treatment for low dielectric constant (low K) materials by ion implantation | Jeremy I. Martin, Eric M. Apelgren, Christian Zistl, Paul R. Besser, Srikantewara Dakshina-Murthy +2 more | 2003-02-04 |
| 6500755 | Resist trim process to define small openings in dielectric layers | Srikanteswara Dakshina-Murthy, Paul R. Besser, Eric M. Apelgren, Christian Zistl, Jeremy I. Martin +2 more | 2002-12-31 |
| 6406993 | Method of defining small openings in dielectric layers | Srikanteswara Dakshina-Murthy, Paul R. Besser, Eric M. Apelgren, Christian Zistl, Jeremy I. Martin +2 more | 2002-06-18 |
| 6315637 | Photoresist removal using a polishing tool | Eric M. Apelgren, Paul R. Besser | 2001-11-13 |
| 6294472 | Dual slurry particle sizes for reducing microscratching of wafers | Paul R. Besser, Jeremy I. Martin | 2001-09-25 |
| 6261963 | Reverse electroplating of barrier metal layer to improve electromigration performance in copper interconnect devices | Larry Zhao, Paul R. Besser, Eric M. Apelgren, Christian Zistl | 2001-07-17 |
| 5985364 | Method of exhaust control for spin-on films with reduced defects | C. Bradford Hopper | 1999-11-16 |