| 8003306 |
Methods of forming electronic devices by ion implanting |
Nabil Yazdani |
2011-08-23 |
| 7737021 |
Resist trim process to define small openings in dielectric layers |
Srikanteswara Dakshina-Murthy, Paul R. Besser, Jonathan B. Smith, Christian Zistl, Jeremy I. Martin +2 more |
2010-06-15 |
| 6610594 |
Locally increasing sidewall density by ion implantation |
Christian Zistl, Jeremy I. Martin, Paul R. Besser, Fred Cheung |
2003-08-26 |
| 6514844 |
Sidewall treatment for low dielectric constant (low K) materials by ion implantation |
Jeremy I. Martin, Christian Zistl, Paul R. Besser, Srikantewara Dakshina-Murthy, Jonathan B. Smith +2 more |
2003-02-04 |
| 6500755 |
Resist trim process to define small openings in dielectric layers |
Srikanteswara Dakshina-Murthy, Paul R. Besser, Jonathan B. Smith, Christian Zistl, Jeremy I. Martin +2 more |
2002-12-31 |
| 6406993 |
Method of defining small openings in dielectric layers |
Srikanteswara Dakshina-Murthy, Paul R. Besser, Jonathan B. Smith, Christian Zistl, Jeremy I. Martin +2 more |
2002-06-18 |
| 6315637 |
Photoresist removal using a polishing tool |
Jonathan B. Smith, Paul R. Besser |
2001-11-13 |
| 6313538 |
Semiconductor device with partial passivation layer |
Christian Zistl, Paul R. Besser, Nicholas J. Kepler, Srikanteswara Dakshina-Murthy |
2001-11-06 |
| 6261963 |
Reverse electroplating of barrier metal layer to improve electromigration performance in copper interconnect devices |
Larry Zhao, Paul R. Besser, Christian Zistl, Jonathan B. Smith |
2001-07-17 |
| 5848382 |
Method for automated energy dose measurement and adjustment for a photoaligner |
Gerald W. Barnett |
1998-12-08 |
| 5780861 |
Adjustable blade reticle assembly |
Darrell Harris |
1998-07-14 |
