Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6140140 | Method for detecting process sensitivity to integrated circuit layout by compound processing | — | 2000-10-31 |
| 6040912 | Method and apparatus for detecting process sensitivity to integrated circuit layout using wafer to wafer defect inspection device | Steven J. Zika | 2000-03-21 |
| 5985364 | Method of exhaust control for spin-on films with reduced defects | Jonathan B. Smith | 1999-11-16 |