Issued Patents All Time
Showing 26–34 of 34 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10615169 | Selective deposition of SiN on horizontal surfaces | Bart J. van Schravendijk, Awnish Gupta, Patrick A. Van Cleemput | 2020-04-07 |
| 10419455 | Cyber-security presence monitoring and assessment | Howard Hayes, Tao Chen, John S. Parkinson | 2019-09-17 |
| 10320821 | Digital safety and account discovery | John S. Parkinson | 2019-06-11 |
| 10224235 | Systems and methods for creating airgap seals using atomic layer deposition and high density plasma chemical vapor deposition | Bart J. van Schravendijk, Hsiang-Yun Lee, Purushottam Kumar | 2019-03-05 |
| 10023956 | Eliminating first wafer metal contamination effect in high density plasma chemical vapor deposition systems | Lin Cui | 2018-07-17 |
| 9906541 | Digital safety and account discovery | John S. Parkinson | 2018-02-27 |
| 9741584 | Densification of dielectric film using inductively coupled high density plasma | Bart J. van Schravendijk | 2017-08-22 |
| 9406544 | Systems and methods for eliminating seams in atomic layer deposition of silicon dioxide film in gap fill applications | Wei Tang, Bart J. van Schravendijk, Kaihan Ashtiani | 2016-08-02 |
| 9355886 | Conformal film deposition for gapfill | Shankar Swaminathan, Bart J. van Schravendijk, Adrien LaVoie, Sesha Varadarajan, Michal Danek +1 more | 2016-05-31 |