Issued Patents 2024
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12183583 | Remote source pulsing with advanced pulse control | Peter Ventzek, Mitsunori Ohata | 2024-12-31 |
| 12131888 | Gas cluster assisted plasma processing | Peter Ventzek | 2024-10-29 |
| 12057293 | Methods for real-time pulse measurement and pulse timing adjustment to control plasma process performance | Merritt Funk, Peter Ventzek | 2024-08-06 |
| 12014901 | Tailored electron energy distribution function by new plasma source: hybrid electron beam and RF plasma | Zhiying Chen, Peter Ventzek | 2024-06-18 |
| 12009430 | Method for gate stack formation and etching | Sergey Voronin, Christopher Catano, Sang Cheol Han, Shyam Sridhar, Yusuke Yoshida +1 more | 2024-06-11 |
| 11961735 | Cyclic plasma processing | Yun Han, Caitlin Philippi, Andrew Metz | 2024-04-16 |
| 11942307 | Plasma processing with radio frequency (RF) source and bias signal waveforms | Zhiying Chen, Barton Lane, Yun Han, Peter Ventzek | 2024-03-26 |
| 11915910 | Fast neutral generation for plasma processing | Peter Ventzek, Mitsunori Ohata | 2024-02-27 |
| 11869756 | Virtual metrology enhanced plasma process optimization method | Jun Shinagawa, Toshihiro KITAO, Atsushi Suzuki, Megan Wooley | 2024-01-09 |