Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12112107 | Virtual metrology for wafer result prediction | Jun Shinagawa, Toshihiro KITAO, Carlos A. Fonseca | 2024-10-08 |
| 11868119 | Method and process using fingerprint based semiconductor manufacturing process fault detection | Nathan Ip | 2024-01-09 |
| 11869756 | Virtual metrology enhanced plasma process optimization method | Jun Shinagawa, Toshihiro KITAO, Atsushi Suzuki, Alok Ranjan | 2024-01-09 |