Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12112107 | Virtual metrology for wafer result prediction | Jun Shinagawa, Megan Wooley, Carlos A. Fonseca | 2024-10-08 |
| 11869756 | Virtual metrology enhanced plasma process optimization method | Jun Shinagawa, Atsushi Suzuki, Megan Wooley, Alok Ranjan | 2024-01-09 |