Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12112107 | Virtual metrology for wafer result prediction | Megan Wooley, Toshihiro KITAO, Carlos A. Fonseca | 2024-10-08 |
| 12032355 | Virtual metrology model based seasoning optimization | Brian D. Pfeifer, John Solis, Brian Gessler, Koichiro Nakamura, Yutaka Hirooka | 2024-07-09 |
| 11869756 | Virtual metrology enhanced plasma process optimization method | Toshihiro KITAO, Atsushi Suzuki, Megan Wooley, Alok Ranjan | 2024-01-09 |