Issued Patents 2024
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12183583 | Remote source pulsing with advanced pulse control | Peter Ventzek, Alok Ranjan | 2024-12-31 |
| 12154761 | Plasma processing apparatus and plasma processing method | Naoki Fujiwara, Takahiro Takeuchi | 2024-11-26 |
| 11972925 | Plasma processing apparatus and plasma processing method | Bong seong Kim, Ken Kobayashi, Yoon Ho Bae | 2024-04-30 |
| 11915910 | Fast neutral generation for plasma processing | Peter Ventzek, Alok Ranjan | 2024-02-27 |