Issued Patents 2024
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12183583 | Remote source pulsing with advanced pulse control | Alok Ranjan, Mitsunori Ohata | 2024-12-31 |
| 12176204 | Cyclic low temperature film growth processes | Jianping Zhao, Toshihiko Iwao | 2024-12-24 |
| 12131888 | Gas cluster assisted plasma processing | Alok Ranjan | 2024-10-29 |
| 12057293 | Methods for real-time pulse measurement and pulse timing adjustment to control plasma process performance | Merritt Funk, Alok Ranjan | 2024-08-06 |
| 12020902 | Plasma processing with broadband RF waveforms | Jianping Zhao, John Carroll, Charles Schlechte | 2024-06-25 |
| 12014901 | Tailored electron energy distribution function by new plasma source: hybrid electron beam and RF plasma | Zhiying Chen, Alok Ranjan | 2024-06-18 |
| 11942307 | Plasma processing with radio frequency (RF) source and bias signal waveforms | Zhiying Chen, Barton Lane, Yun Han, Alok Ranjan | 2024-03-26 |
| 11915910 | Fast neutral generation for plasma processing | Mitsunori Ohata, Alok Ranjan | 2024-02-27 |