Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12176204 | Cyclic low temperature film growth processes | Jianping Zhao, Peter Ventzek | 2024-12-24 |
| 11996268 | Plasma processing apparatus and plasma processing method | — | 2024-05-28 |