Issued Patents 2024
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12176183 | RF voltage and current (V-I) sensors and measurement methods | Barton Lane, Yohei Yamazawa, Justin Moses, Chelsea DuBose, Michael Hummel | 2024-12-24 |
| 12119207 | Apparatus for plasma processing | Barton Lane | 2024-10-15 |
| 12074390 | Parallel resonance antenna for radial plasma control | Chelsea DuBose, Barton Lane, Justin Moses | 2024-08-27 |
| 12057293 | Methods for real-time pulse measurement and pulse timing adjustment to control plasma process performance | Peter Ventzek, Alok Ranjan | 2024-08-06 |