Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12014901 | Tailored electron energy distribution function by new plasma source: hybrid electron beam and RF plasma | Peter Ventzek, Alok Ranjan | 2024-06-18 |
| 11942307 | Plasma processing with radio frequency (RF) source and bias signal waveforms | Barton Lane, Yun Han, Peter Ventzek, Alok Ranjan | 2024-03-26 |