Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12040176 | Technologies for high aspect ratio carbon etching with inserted charge dissipation layer | Shihsheng Chang, Andrew Metz, Minjoon Park, Ya-Ming Chen | 2024-07-16 |
| 11961735 | Cyclic plasma processing | Caitlin Philippi, Andrew Metz, Alok Ranjan | 2024-04-16 |
| 11942307 | Plasma processing with radio frequency (RF) source and bias signal waveforms | Zhiying Chen, Barton Lane, Peter Ventzek, Alok Ranjan | 2024-03-26 |