Issued Patents 2024
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12080599 | Methods for forming self-aligned contacts using spin-on silicon carbide | Junling Sun, Lior Huli, Angelique Raley | 2024-09-03 |
| 12040176 | Technologies for high aspect ratio carbon etching with inserted charge dissipation layer | Shihsheng Chang, Yun Han, Minjoon Park, Ya-Ming Chen | 2024-07-16 |
| 11978631 | Forming contact holes with controlled local critical dimension uniformity | Junling Sun, Katie Lutker-Lee, Angelique Raley | 2024-05-07 |
| 11961735 | Cyclic plasma processing | Yun Han, Caitlin Philippi, Alok Ranjan | 2024-04-16 |