Issued Patents 2024
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12100591 | Photoactive metal-based hard mask integration | Katie Lutker-Lee | 2024-09-24 |
| 12080599 | Methods for forming self-aligned contacts using spin-on silicon carbide | Junling Sun, Lior Huli, Andrew Metz | 2024-09-03 |
| 12009211 | Method for highly anisotropic etching of titanium oxide spacer using selective top-deposition | Ya-Ming Chen, Katie Lutker-Lee, Eric Chih-Fang Liu, Stephanie Oyola-Reynoso, Shihsheng Chang | 2024-06-11 |
| 11978631 | Forming contact holes with controlled local critical dimension uniformity | Junling Sun, Katie Lutker-Lee, Andrew Metz | 2024-05-07 |
| 11915931 | Extreme ultraviolet lithography patterning method | Choong-Man Lee, Soo Doo Chae, Qiaowei Lou, Toshio Hasegawa, Yoshihiro Kato | 2024-02-27 |
| 11882776 | In-situ encapsulation of metal-insulator-metal (MIM) stacks for resistive random access memory (RERAM) cells | Katie Lutker-Lee, Dina H. Triyoso | 2024-01-23 |