Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11915931 | Extreme ultraviolet lithography patterning method | Soo Doo Chae, Angelique Raley, Qiaowei Lou, Toshio Hasegawa, Yoshihiro Kato | 2024-02-27 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11915931 | Extreme ultraviolet lithography patterning method | Soo Doo Chae, Angelique Raley, Qiaowei Lou, Toshio Hasegawa, Yoshihiro Kato | 2024-02-27 |