Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12148624 | Wet etch process and method to control fin height and channel area in a fin field effect transistor (FinFET) | Shan Hu, Henan Zhang, Sangita Kumari, Peter Delia | 2024-11-19 |
| 12100598 | Methods for planarizing a substrate using a combined wet etch and chemical mechanical polishing (CMP) process | Shan Hu, Henan Zhang, Sangita Kumari, Peter Delia | 2024-09-24 |
| 12009211 | Method for highly anisotropic etching of titanium oxide spacer using selective top-deposition | Ya-Ming Chen, Katie Lutker-Lee, Angelique Raley, Stephanie Oyola-Reynoso, Shihsheng Chang | 2024-06-11 |