Issued Patents 2024
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12148624 | Wet etch process and method to control fin height and channel area in a fin field effect transistor (FinFET) | Eric Chih-Fang Liu, Henan Zhang, Sangita Kumari, Peter Delia | 2024-11-19 |
| 12148625 | Methods to prevent surface charge induced cd-dependent etching of material formed within features on a patterned substrate | Henan Zhang, Sangita Kumari, Peter Delia, Robert D. Clark | 2024-11-19 |
| 12103052 | Method and single wafer processing system for processing of semiconductor wafers | Peter D'Elia, Ronald Nasman | 2024-10-01 |
| 12100598 | Methods for planarizing a substrate using a combined wet etch and chemical mechanical polishing (CMP) process | Eric Chih-Fang Liu, Henan Zhang, Sangita Kumari, Peter Delia | 2024-09-24 |
| 12100599 | Wet etch process and method to provide uniform etching of material formed within features having different critical dimension (CD) | Henan Zhang, Sangita Kumari, Peter Delia | 2024-09-24 |