Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12105422 | Photoresist development with halide chemistries | Samantha Tan, Jengyi Yu, Da Li, Yiwen FAN, Yang Pan +5 more | 2024-10-01 |
| 12080562 | Atomic layer etch and ion beam etch patterning | Samantha Tan, Tamal Mukherjee, Girish Dixit, Yang Pan | 2024-09-03 |
| 11935758 | Atomic layer etching for subtractive metal etch | Mohand Brouri, Samantha Tan, Shih-Ked Lee, Yiwen FAN, Wook Choi +3 more | 2024-03-19 |