Issued Patents 2024
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12183604 | Integrated dry processes for patterning radiation photoresist patterning | Samantha Tan, Mohammed Haroon Alvi, Richard Wise, Yang Pan, Richard A. Gottscho +5 more | 2024-12-31 |
| 12183589 | Tin oxide mandrels in patterning | Samantha Tan, Seongjun Heo, Boris Volosskiy, Sivananda K. Kanakasabapathy, Richard Wise +2 more | 2024-12-31 |
| 12105422 | Photoresist development with halide chemistries | Samantha Tan, Da Li, Yiwen FAN, Yang Pan, Jeffrey Marks +5 more | 2024-10-01 |
| 12094711 | Tin oxide films in semiconductor device manufacturing | Samantha Tan, Yu Jiang, Hui-Jung Wu, Richard Wise, Yang Pan +2 more | 2024-09-17 |
| 12062538 | Atomic layer etch and selective deposition process for extreme ultraviolet lithography resist improvement | Samantha Tan, Liu-Yang Yang, Chen-Wei Liang, Boris Volosskiy, Richard Wise +4 more | 2024-08-13 |
| 12027375 | Selective etch using a sacrificial mask | Daniel Peter, Da Li, Alexander Kabansky, Katie Lynn Nardi, Samantha Tan +1 more | 2024-07-02 |
| 11988965 | Underlayer for photoresist adhesion and dose reduction | Samantha Tan, Jun Xue, Mary Anne Manumpil, Da Li | 2024-05-21 |