Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12131909 | Selective processing with etch residue-based inhibitors | Kashish Sharma, Taeseung Kim, Dennis M. Hausmann | 2024-10-29 |
| 12062538 | Atomic layer etch and selective deposition process for extreme ultraviolet lithography resist improvement | Jengyi Yu, Liu-Yang Yang, Chen-Wei Liang, Boris Volosskiy, Richard Wise +4 more | 2024-08-13 |
| 11988965 | Underlayer for photoresist adhesion and dose reduction | Jun Xue, Mary Anne Manumpil, Jengyi Yu, Da Li | 2024-05-21 |