Issued Patents 2024
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12183589 | Tin oxide mandrels in patterning | Jengyi Yu, Samantha Tan, Seongjun Heo, Boris Volosskiy, Sivananda K. Kanakasabapathy +2 more | 2024-12-31 |
| 12183604 | Integrated dry processes for patterning radiation photoresist patterning | Jengyi Yu, Samantha Tan, Mohammed Haroon Alvi, Yang Pan, Richard A. Gottscho +5 more | 2024-12-31 |
| 12094711 | Tin oxide films in semiconductor device manufacturing | Jengyi Yu, Samantha Tan, Yu Jiang, Hui-Jung Wu, Yang Pan +2 more | 2024-09-17 |
| 12062538 | Atomic layer etch and selective deposition process for extreme ultraviolet lithography resist improvement | Jengyi Yu, Samantha Tan, Liu-Yang Yang, Chen-Wei Liang, Boris Volosskiy +4 more | 2024-08-13 |
| 12051589 | Tin oxide thin film spacers in semiconductor device manufacturing | David Charles Smith, Arpan Mahorowala, Patrick A. Van Cleemput, Bart J. van Schravendijk | 2024-07-30 |
| 11987876 | Chamfer-less via integration scheme | Sivananda K. Kanakasabapathy, Hui-Jung Wu, Arpan Mahorowala | 2024-05-21 |