Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12183604 | Integrated dry processes for patterning radiation photoresist patterning | Jengyi Yu, Samantha Tan, Mohammed Haroon Alvi, Richard Wise, Yang Pan +5 more | 2024-12-31 |
| 12105422 | Photoresist development with halide chemistries | Samantha Tan, Jengyi Yu, Da Li, Yiwen FAN, Yang Pan +5 more | 2024-10-01 |