Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12105422 | Photoresist development with halide chemistries | Samantha Tan, Jengyi Yu, Da Li, Yang Pan, Jeffrey Marks +5 more | 2024-10-01 |
| 11935758 | Atomic layer etching for subtractive metal etch | Wenbing Yang, Mohand Brouri, Samantha Tan, Shih-Ked Lee, Wook Choi +3 more | 2024-03-19 |