Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12062537 | High etch selectivity, low stress ashable carbon hard mask | Jun Xue, Mary Anne Manumpil, Samantha Tan | 2024-08-13 |
| 11935758 | Atomic layer etching for subtractive metal etch | Wenbing Yang, Mohand Brouri, Samantha Tan, Yiwen FAN, Wook Choi +3 more | 2024-03-19 |