Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12119243 | Plasma etching chemistries of high aspect ratio features in dielectrics | Keren Jacobs Kanarik, Samantha Tan, Yang Pan | 2024-10-15 |
| 12105422 | Photoresist development with halide chemistries | Samantha Tan, Jengyi Yu, Da Li, Yiwen FAN, Yang Pan +5 more | 2024-10-01 |